I'm pasting this directly out of my notes so it's a little rough, but I thought this might be helpful to some of you.
Rare Nanite spawns –
outside loel's lounge, near the 3-way intersection in an open area
corner of the big solar array near the Zephyr Terminal
beside the castle household, near the playful public pool
along the footpath leading back to town by Pleasant Meadows Cemetery
calling the town north, east of the site named barren wasteland, near a rock.
Another on the northern side of the barren wasteland site.
At the sunken houseboat south of the barren wasteland site.
At the sunken house north of the crash site
Southwestern corner of the wasteland, near another sunken houseboat, up on a hill
Reverse Engineer Nanite
receive design
common nanites yield 2-4 small blank processors
uncommon nanites yield 2-4 random small or medium blank processors
rare nanites yield yield 2-4 random small to large blank processors